Use este identificador para citar ou linkar para este item: http://www.alice.cnptia.embrapa.br/alice/handle/doc/1187387
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dc.contributor.authorPAULA. K. T.
dc.contributor.authorFACURE, M. H. M.
dc.contributor.authorANDRADE, M. B.
dc.contributor.authorCORREA, D. S.
dc.contributor.authorMENDONÇA, C. R.
dc.date.accessioned2026-06-08T20:48:36Z-
dc.date.available2026-06-08T20:48:36Z-
dc.date.created2026-06-08
dc.date.issued2026
dc.identifier.citationACS Omega, v. 11, 2026.
dc.identifier.urihttp://www.alice.cnptia.embrapa.br/alice/handle/doc/1187387-
dc.descriptionThere is growing interest in usingMXene-basedmaterials for electronic and energy storage applications by integratingadvancedmicrofabricationtechniques. Inthiswork,we investigatethe femtosecondlasermicromachiningofTi3C2Tx MXenefilms toenable thedirect fabricationofmicrosupercapacitor(MSC)electrodeswithhighprecisionandminimal thermal damage.The influenceofpulseenergyandnumberofpulsesontheresultingmicrostructureswas systematicallyanalyzedusing Scanning ElectronMicroscopy, Atomic ForceMicroscopy, EnergyDispersiveX-ray Spectroscopy, andRaman spectroscopy. Irradiationwith lowpulsecounts(1−5pulsesat1010nJ)produced localizedfeatureswithdepthsof 0.5−1.0μmandminimal redeposition,whereashigherpulsenumbers(upto20,000)yieldedfeaturesof∼1.2μmwithpartialmaterialremovalandresolidified regions.Incubationanalysisrevealedaprogressivereductioninablationthresholdwithincreasingpulsenumber.Elementalmapping andRamanspectraconfirmedefficientmaterial removal andexposureof theunderlyingsubstrate.Usingoptimizedparameters, interdigitatedelectrodeswerefabricatedandintegratedintoplanarMSCs,whichexhibitedanarealcapacitanceof19mF/cm2at5 mV/s, aswell as energy andpower densities of 0.45μWh/cm2 and0.3mW/cm2 at 1mA/cm2, respectively. These results demonstratethatfemtosecondlaserprocessingprovidesaversatileandhigh-resolutionapproachforMXenepatterning,withstrong potential forscalablemicrodevicefabricationinenergy-relatedtechnologies.
dc.language.isoeng
dc.rightsopenAccess
dc.subjectIcrosupercapacitors (MSCs) Systematic variationof pulse e
dc.subjectOn-chipenergystoragedevices
dc.titleFemtosecond Laser Microfabrication of Ti3C2Tx MXene for Micro Supercapacitor Electrodes.
dc.typeArtigo de periódico
dc.format.extent25384−5395
riaa.ainfo.id1187387
riaa.ainfo.lastupdate2026-06-08
dc.identifier.doihttps://doi.org/10.1021/acsomega.5c08652
dc.contributor.institutionUNIVERSIDADE DE SAO PAULO; UNIVERSIDADE FEDERAL DE SAO CARLOS; UNIVERSIDADE DE SAO PAULO; DANIEL SOUZA CORREA, CNPDIA; UNIVERSIDADE DE SAO PAULO.
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