Title:	Femtosecond Laser Microfabrication of Ti3C2Tx MXene for Micro Supercapacitor Electrodes.
Authors:	PAULA. K. T. FACURE, M. H. M. ANDRADE, M. B. CORREA, D. S. MENDONÇA, C. R.
Affiliation:	UNIVERSIDADE DE SAO PAULO; UNIVERSIDADE FEDERAL DE SAO CARLOS; UNIVERSIDADE DE SAO PAULO; DANIEL SOUZA CORREA, CNPDIA; UNIVERSIDADE DE SAO PAULO.
Date Issued:	2026
Citation:	ACS Omega, v. 11, 2026.
Pages:	5384−5395
Description:	There is growing interest in usingMXene-basedmaterials for electronic and energy storage applications by integratingadvancedmicrofabricationtechniques. Inthiswork,we investigatethe femtosecondlasermicromachiningofTi3C2Tx MXenefilms toenable thedirect fabricationofmicrosupercapacitor(MSC)electrodeswithhighprecisionandminimal thermal damage.The influenceofpulseenergyandnumberofpulsesontheresultingmicrostructureswas systematicallyanalyzedusing Scanning ElectronMicroscopy, Atomic ForceMicroscopy, EnergyDispersiveX-ray Spectroscopy, andRaman spectroscopy. Irradiationwith lowpulsecounts(1−5pulsesat1010nJ)produced localizedfeatureswithdepthsof 0.5−1.0μmandminimal redeposition,whereashigherpulsenumbers(upto20,000)yieldedfeaturesof∼1.2μmwithpartialmaterialremovalandresolidified regions.Incubationanalysisrevealedaprogressivereductioninablationthresholdwithincreasingpulsenumber.Elementalmapping andRamanspectraconfirmedefficientmaterial removal andexposureof theunderlyingsubstrate.Usingoptimizedparameters, interdigitatedelectrodeswerefabricatedandintegratedintoplanarMSCs,whichexhibitedanarealcapacitanceof19mF/cm2at5 mV/s, aswell as energy andpower densities of 0.45μWh/cm2 and0.3mW/cm2 at 1mA/cm2, respectively. These results demonstratethatfemtosecondlaserprocessingprovidesaversatileandhigh-resolutionapproachforMXenepatterning,withstrong potential forscalablemicrodevicefabricationinenergy-relatedtechnologies.
Keywords:	Icrosupercapacitors (MSCs) Systematic variationof pulse e On-chipenergystoragedevices
DOI:	https://doi.org/10.1021/acsomega.5c08652
Type of Material:	Artigo de periódico
Access:	openAccess
Appears in Collections:	Artigo em periódico indexado (CNPDIA)