Título:	Femtosecond Laser Microfabrication of Ti3C2Tx MXene for Micro Supercapacitor Electrodes.
Autoria:	PAULA. K. T. FACURE, M. H. M. ANDRADE, M. B. CORREA, D. S. MENDONÇA, C. R.
Afiliação:	UNIVERSIDADE DE SAO PAULO; UNIVERSIDADE FEDERAL DE SAO CARLOS; UNIVERSIDADE DE SAO PAULO; DANIEL SOUZA CORREA, CNPDIA; UNIVERSIDADE DE SAO PAULO.
Ano de publicação:	2026
Referência:	ACS Omega, v. 11, 2026.
Páginas:	5384−5395
Conteúdo:	There is growing interest in usingMXene-basedmaterials for electronic and energy storage applications by integratingadvancedmicrofabricationtechniques. Inthiswork,we investigatethe femtosecondlasermicromachiningofTi3C2Tx MXenefilms toenable thedirect fabricationofmicrosupercapacitor(MSC)electrodeswithhighprecisionandminimal thermal damage.The influenceofpulseenergyandnumberofpulsesontheresultingmicrostructureswas systematicallyanalyzedusing Scanning ElectronMicroscopy, Atomic ForceMicroscopy, EnergyDispersiveX-ray Spectroscopy, andRaman spectroscopy. Irradiationwith lowpulsecounts(1−5pulsesat1010nJ)produced localizedfeatureswithdepthsof 0.5−1.0μmandminimal redeposition,whereashigherpulsenumbers(upto20,000)yieldedfeaturesof∼1.2μmwithpartialmaterialremovalandresolidified regions.Incubationanalysisrevealedaprogressivereductioninablationthresholdwithincreasingpulsenumber.Elementalmapping andRamanspectraconfirmedefficientmaterial removal andexposureof theunderlyingsubstrate.Usingoptimizedparameters, interdigitatedelectrodeswerefabricatedandintegratedintoplanarMSCs,whichexhibitedanarealcapacitanceof19mF/cm2at5 mV/s, aswell as energy andpower densities of 0.45μWh/cm2 and0.3mW/cm2 at 1mA/cm2, respectively. These results demonstratethatfemtosecondlaserprocessingprovidesaversatileandhigh-resolutionapproachforMXenepatterning,withstrong potential forscalablemicrodevicefabricationinenergy-relatedtechnologies.
Palavras-chave:	Icrosupercapacitors (MSCs) Systematic variationof pulse e On-chipenergystoragedevices
Digital Object Identifier:	https://doi.org/10.1021/acsomega.5c08652
Tipo do material:	Artigo de periódico
Acesso:	openAccess
Aparece nas coleções:	Artigo em periódico indexado (CNPDIA)